Model Gallery

The Model Gallery features COMSOL Multiphysics model files from a wide variety of application areas including the electrical, mechanical, fluid, and chemical disciplines. You can download ready-to-use models and step-by-step instructions for building the model, and use these as a starting point for your own modeling work. Use the Quick Search to find models relevant to your area of expertise, and login or create a COMSOL Access account that is associated with a valid COMSOL license to download the model files.

Thickness Shear Mode Quartz Oscillator

AT cut quartz crystals are widely employed in a range of applications, from oscillators to microbalances. One of the important properties of the AT cut is that the resonant frequency of the crystal is temperature independent to first order. This is desirable in both mass sensing and timing applications. AT cut crystals vibrate in the thickness shear modeā€”an applied voltage across the faces of ...

Electrostatically Actuated Cantilever

The elastic cantilever beam is one of the elementary structures used in MEMS designs. This model shows the bending of a cantilever beam under an applied electrostatic load. The model solves the deformation of the beam under an applied voltage.

Computing Capacitance in a Comb Drive

Capacitive comb drives are commonly used both as actuators and position sensors. The following model focuses on position measurement. Many approaches exist for positional measurements with MEMS devices, of which capacitance measurement is the most widely used, particularly in micro-accelerometers. In a pair of interdigitated combs the fingers of one comb do not touch those of the other comb, ...

Biased Resonator Models (2D)

Silicon micromechanical resonators have long been used for designing sensors and are now becoming increasingly important as oscillators in the consumer electronics market. In this series of models, a surface micromachined MEMS resonator, designed as part of a micromechanical filter, is analyzed in detail. The Stationary Analysis of a Biased Resonator model performs a stationary analysis of ...

A Piezoceramic Tube

This example involves a static 2D axisymmetric analysis of a piezoelectric actuator using the Piezoelectric Devices physics interface. It models a radially polarized piezoelectric tube, as described by S. Peelamedu and co-authors. An application area where radially polarized tubes are employed is in nozzles for fluid control in inkjet printers.

Biased Resonator Models (3D)

An electrostatically actuated MEMS resonator is simulated in the time and frequency domains. The device is driven by an AC + DC bias voltage applied across a parallel plate capacitor. The dependence of the resonant frequency on DC bias is assessed, and frequency domain and transient analyses are performed to investigate the device performance.

Pull-in of an RF MEMS Switch

This model analyzes an RF MEMS switch consisting of a thin micromechanical bridge suspended over a dielectric layer. A DC voltage greater than the pull-in voltage is applied across the switch, causing the bridge to collapse onto the dielectric layer with a resulting increase in the capacitance of the device. A penalty based contact force is implemented to model the contact forces as the bridge ...

Thermal Stresses in a Layered Plate

The thermal stress in a layered plate is studied in this example. A plate consisting of two layers, a coating and a substrate layer is stress and strain free at 800 degrees C. The temperature of the plate is reduced to 150 degrees C and thermal stresses are induced. A third layer, the carrier layer, is added and the thermal stresses in the coating and a substrate layer are added as an initial ...

Residual Stress in a Thin-Film Resonator

Surface micromachined thin films are often subject to residual stress. This COMSOL Multiphysics example describes a thin film resonator with straight or folded cantilever beam springs. The resonance frequencies of the resonator are affected by thermal stress. Using folded springs relieves this effect. The example is made up of four models: two thin film resonators with folded cantilever beam ...

Prestressed Micromirror

One method of creating spring-like structures or inducing curvature in thin structures is to plate them to substrates that are under the influence of residual stresses. The plating process can control this stress even for similar materials. One such device is the electrostatically controlled micromirror. It is typically quite small, and arrays of such devices can be implemented in projectors. ...

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