VLSI Layout Based Design Optimization of a Piezoresistive MEMS Pressure Sensors using COMSOL Multiphysics
R. Komaragiri, Sarath. S., N. Kattabomman
NIT Calicut, Kozhikode, Kerala
This paper focuses on the diaphragm design and optimization of a piezoresistive Micro Electro Mechanical System (MEMS) pressure sensor by considering Very Large Scale Integration (VLSI) layout schemes. The aim of these studies is to find an optimal diaphragm shape by Finite Element Method (FEM) using COMSOL®, which is most suitable for VLSI layout. Optimal diaphragm shape is a diaphragm shape ...
R. Krishnan, H.B. Nemade, and R. Paily
Indian Institute of Technology, Guwahati
In this paper, we discuss simulation of one-port Surface Acoustic Wave (SAW) resonators using COMSOL Multiphysics. Resonator action can be achieved in one of the two ways; a single Inter-digital Transducer (IDT) having several fingers over a piezoelectric substrate or a short IDT with reflecting gratings at the ends of the IDT. We have modeled a Rayleigh wave type SAW device choosing YZ ...
H.T.D. Grigg, T.H. Hanley, B.J. Gallacher
Newcastle University, Newcastle upon Tyne, United Kingdom
This work is concerned with systems possessing cyclic symmetries. In particular, we concentrate on the case in which the medium possesses infinite order cyclic symmetry, while the constitutive relations have cyclic symmetry of a lower order. We investigate the interactions between modes with cyclic symmetry of order n and geometries with underlying cyclic symmetry of order M. Rayleigh's ...
Y.L. Rao, and G. Zhang[1-3]
 Micro/Nano Bioengineering Laboratory, Department of Biological and Agricultural Engineering, The University of Georgia
 Nanoscale Science and Engineering Center, The University of Georgia
 Faculty of Engineering, The University of Georgia
Integration of surface acoustic wave (SAW) devices with nanostructures has gained interest in the development of sensors with high sensitivity. To better design nanostructure integrated SAW devices, it is essential to model three dimensional (3-D) SAW devices and analyze the wave propagation characteristics in nanostructure-enhanced SAW devices. In this work, a 3-D finite element model of ...
J. Golebiowski, S. Milcarz
Technical University of Lodz, Poland
The use of optical sensors in the industry is still growing. A transmission of signal from the sensors is mostly done by optical fibers. Switching the signals from optical paths may be done by using micromechanical silicon switches. The main advantage is an ability to transmit data from many sensors using different wavelengths, simultaneously minimizing optical power losses. A silicon beam with ...
Modeling and Simulation of the Rapid and Automated Measurement of Biofuel Blending in a Microfluidic Device under Pressure Driven Flow using COMSOL Multiphysics®
Sanket Goel, Venkateswaran PS, Rahul Prajesh, Ajay Agarwal
University of Petroleum & Energy Studies, Bidholi, Prem Nagar, Dehradun, India
CSIR - Central Electronics Engineering Research Institute,(CSIR-CEERI) Pilani, India
• Real-time detection and monitoring of bio-fuel blend-ratio and adulterated automobile fuels by a reproducible micro-fabrication process in a cost-and-time efficient manner. • COMSOL Multiphysics® simulations and modelling of Viscosity based Laminar Flow inside a Y-shaped Micro-fluidic Device. • Design and Fabrication of a polymer Y-shaped Micro-fluidic Device to work as ...
L. Nayana, P. Manohar, S. Babu
Department of Electrical Engineering, Visvesvaraya Technological University, Bangalore, Karnataka, India
In this paper some discrete parts of a valveless piezoelectric micropump for drug delivery system is designed and simulated. The core components of the micropump are actuator unit that converts the reciprocating movement of a diaphragm actuated by a piezoelectric actuator into a pumping effect and Nozzle/diffuser elements that are used to direct the flow from inlet to outlet. Simulations are ...
M. Hashiguchi, Y. Sumiyoshi
Keisoku Engineering System Co., Ltd., Tokyo, Japan
Achieving passive device working over two GHz bands for next generation mobile phone has been strongly desired. This paper investigated the spurious mode suppression for the BAW resonator. The border-frame technique which has been proposed in many literatures is examined here numerically. It was found that the present finite-element analysis using COMSOL Multiphyiscs® was validated via ...
Implementation of ALE Moving Mesh for Transient Modeling of Nanowire Trajectories Caused by Electrokinetic Forces
S.M. Davison, and K.V. Sharp
Pennsylvania State University
Moving nanowires through microfluidic channels under electrokinetic forces can be a valuable technique to aid in the fabrication of certain devices. The trajectories of a nanowire under the influence of an externally applied electric field have been modelled through a straight channel, through a converging channel, and around a 90° corner. In a straight channel, a nanowire initially ...
P. Lazarou, C. Rotinat
CEA LIST/DIASI/LRI, Paris, France
A grand variety of microactuator technologies and demonstrators has been introduced during the last years. Of particular interest are the microactuators based on phase change materials and especially paraffin wax, which can volumetrically expand up to 15%, providing high force actuation. The object of this study is the numerical validation of a paraffin microactuator concept by coupling multiple ...